AFM image of the diamond like film surface. The surface roughness is about 5 nm.
Micro-hardness of diamond-like coating samples RF and VHF PECVD installation with 75 mm diameter deposition surface.
PECVD
installation equipped by two-sides electrode system with 50×50 cm area. |
MAIN COATING FEATURES: high hardness, low friction coefficient, low chemical activity , low electrical conductivity, high thermal conductivity MAIN
TECHNOLOGY FEATURES: Coating thickness from 0.3 to 2 mm, Application areas.
ELECTRONICS, MECHANICAL ENGINEERING,
MEDICINE, OPTICS Description. The technique uses plasma enhanced chemical vapor deposition (PECVD) principles. The developed technique allows obtaining of 0.3 ÷ 2 μm coating by diamond-like carbon (sp3 fraction up to 64%) on silicon, glass, titanium or stainless steel substrates. The achieved film grow rate – 1 nm/sec. Advantages.
Development stage. The basic methods of DLC coating has been developed and tested. The large semi-industrial PECVD reactor has been designed and manufactured. Collaboration offers. The research team is interested in joint research aimed on adaptation of the developed techniques for “end-user” objects coating. We could also provide a consulting in optimization and development of PECVD processes, For a well established process with a large volume recovery, the DLC coating costs is about 0.5 EUR/cm2. |