FAST RESPONSE VACUUM GAS VALVE

Piezoelectric vacuum gas valve with an electronic control unit was designed for fast and precise gas puffing.

The valve consists of the following details:

1- support;
2 -piezoelectric crystal mounting;
3 - piezoelectric crystal;
4 - gasket;
5 - nozzle;
6 - needle regulator;
7 - input pipe;
8 - output pipe;
9 - power supply connectors;
10 - case.

Conductivity
(@ 1 bar pressure drop)

1 ÷ 30 ml/s

Input pressure

0.4 ÷ 6 bar

Working frequency

0 ÷300 Hz

Closed valve leak rate

(@ 1 bar input pressure)

< 10^-6 torr·L/s

Maximum working temperature

200 °C

Valve dimensions (including connectors)

Ø 37×150 mm

Valve weight

< 0.65 kg